http://arrow.latrobe.edu.au:8080/vital/access/manager/Index ${session.getAttribute("locale")} 5 AFM-measured surface roughness of SU-8 structures produced by deep x-ray lithography. http://arrow.latrobe.edu.au:8080/vital/access/manager/Repository/latrobe:17389 Wed 09 Dec 2015 20:39:39 EST ]]> Sidewall slopes and roughness of SU-8 HARMST. http://arrow.latrobe.edu.au:8080/vital/access/manager/Repository/latrobe:27320 Thu 10 Dec 2015 01:36:29 EST ]]> Production issues for high aspect ratio Lobster-eye optics using LIGA http://arrow.latrobe.edu.au:8080/vital/access/manager/Repository/latrobe:24250 Thu 10 Dec 2015 00:32:26 EST ]]>