GlobalView

Harvey, E. C.

Showing items 1 - 11 of 11.

Add to Quick Collection   All 11 Results

  • First
  • Previous
  • 1
  • Next
  • Last
Sort:
  Add All Items to Quick Collection
Add  Sidewall slopes and roughness of SU-8 HARMST.
Authors: Vora, Kaushal Dhirendra. | Shew, B. Y. | Lochel, B. | Harvey, E. C. | Hayes, J. P. | Peele, Andrew Gareth.
Date: 2008.
Subject: 100700 Nanotechnology | 0205 (four-digit-FOR)
Language: en
Type: journal article
Identifier: http://hdl.handle.net/1959.9/461249
Description: DEST collection year : 2010
Add  Sidewall slopes of SU-8 HARMST using deep x-ray lithography.
Authors: Vora, Kaushal Dhirendra. | Shew, B. Y. | Harvey, E. C. | Hayes, J. P. | Peele, Andrew Gareth.
Date: 2008.
Subject: 091500 Interdisciplinary Engineering | 0205 (four-digit-FOR)
Language: en
Type: journal article
Identifier: http://hdl.handle.net/1959.9/475199
Description: DEST collection year : 2009
Add  Fabrication of support structures to prevent SU-8 stiction in high aspect ratio structures.
Authors: Vora, K. D. | Peele, A. G. | Shew, B. Y. | Harvey, E. C. | Hayes, J. P.
Date: 2007.
Subject: 100700 Nanotechnology | 0205 (four-digit-FOR)
Language: en
Type: journal article
Identifier: http://hdl.handle.net/1959.9/422293
Description: DEST collection year : 2010
Add  Production issues for high aspect ratio Lobster-eye optics using LIGA
Authors: Hayes, J. P. | Harvey, E. C. | Lochel, B. | Shew, B. Y. | Vora, Kaushal Dhirendra. | Peele, Andrew Gareth. | HARMST 2005 (Gyenogju, Korea/Hotel Hyundai)
Date: 2007.
Subject: 100700 Nanotechnology | 0205 (four-digit-FOR)
Language: en
Type: journal article
Identifier: http://hdl.handle.net/1959.9/450643
Description: DEST collection year : 2010
Add  AFM-measured surface roughness of SU-8 structures produced by deep x-ray lithography.
Authors: Vora, Kaushal Dhirendra. | Lochel, B. | Harvey, E. C. | Hayes, J. P. | Peele, Andrew. | School of Engineering and Mathematical Sciences.
Date: 2006.
Subject: 249903 Instruments and Techniques | 091500 Interdisciplinary Engineering | 0205 (four-digit-FOR)
Language: en
Type: journal article
Identifier: http://hdl.handle.net/1959.9/412390
Description: DEST collection year:2007
Add  Process optimisation for compact, high aspect ratio SU-8 microstructures using x-ray lithography
Authors: Peele, Andrew Gareth. | Harvey, E. C. | Shew, B. Y. | Hayes, J. P. | Vora, Kaushal Dhirendra. | SPIE Proceedings (Brisbane, Australia)
Date: 2005.
Language: en
Type: conference paper
Identifier: http://hdl.handle.net/1959.9/416367
Description: DEST collection year : 2006
Add  Specification of mechanical support structures to prevent SU-8 stiction in high aspect ratio structures.
Authors: Vora, K D. | Shew, B. Y. | Harvey, E. C. | Hayes, J. P. | Peele, A. G. | School of Engineering and Mathematical Sciences.
Date: 2005.
Subject: 249903 Instruments and Techniques | 091500 Interdisciplinary Engineering | 0204 (four-digit-FOR)
Language: en
Type: journal article
Identifier: http://hdl.handle.net/1959.9/488900
Description: DEST collection year:2006
Add  X-ray Lithography - An Australian Perspective.
Authors: Peele, Andrew. | Vora, Kaushal Dhirendra. | Harvey, E. C. | Barber, R. L. | Chen, C. G. | School of Engineering and Mathematical Sciences. | Australian Institute of Physics. National Congress (16th : 2005 : Canberra, Australia)
Date: 2005.
Subject: 249903 Instruments and Techniques | 029904 Synchrotrons; Accelerators; Instruments and Techniques | 0299 (four-digit-FOR)
Language: en
Type: conference paper
Identifier: http://hdl.handle.net/1959.9/337042
Description: DEST collection year:2006
Add  Disposable bio-chip fabrication of DNA diagnostics
Authors: Cattrall, Robert. | Poetter, K. | Harvey, E. C. | Brack, Narelle. | Hayes, J. P. | Atkin, M. | Biomedical Applications of Micro- and Nanoengineering
Date: 2002.
Subject: 030603 Colloid and Surface Chemistry | 090301 Biomaterials | 0903 (four-digit-FOR) | 0306 (four-digit-FOR)
Language: en
Type: conference paper
Identifier: http://hdl.handle.net/1959.9/403042
Description: DEST collection year : 2007
Add  Fabrication of X-ray Spiral Masks by Laser Ablation
Authors: Peele, Andrew Gareth. | Nugent, Keith A. | Paterson, D. | Tran, Chanh Quoc. | Mancuso, A. P. | Mackin, T. R. | Hayes, J. P. | Harvey, E. C. | McNulty, I. | McMahon, P. J.
Date: 2002.
Subject: 020599 Optical Physics not elsewhere classified | 0205 (four-digit-FOR)
Language: en
Type: conference paper
Identifier: http://hdl.handle.net/1959.9/477234
Description: DEST collection year : 2003
Add  Observation of an x-ray vortex.
Authors: Peele, Andrew Gareth. | Tran, Chanh Quoc. | Mancuso, A. P. | Paterson, D. | Nugent, Keith A. | Hayes, J. P. | Harvey, E. C. | Lai, B. | McNulty, I. | McMahon, P. J.
Date: 2002.
Subject: 029904 Synchrotrons; Accelerators; Instruments and Techniques | 0299 (four-digit-FOR)
Language: en
Type: journal article
Identifier: http://hdl.handle.net/1959.9/395955
Description: DEST collection year : 2003
Full Text: Full Text
  • First
  • Previous
  • 1
  • Next
  • Last